[IEEE 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Cannes, France (2014.4.1-2014.4.4)] 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Development of wide pressure range vacuum senser using piezoelectric beam structure
Wang, Bing-Yu, Wu, Chia-CheYear:
2014
Language:
english
DOI:
10.1109/DTIP.2014.7056656
File:
PDF, 500 KB
english, 2014