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[IEEE Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005. - Grenoble, France (12-16 Sept. 2005)] Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005. - CMOS integration of solid phase epitaxy for sub-50nm devices
Pouydebasque, A., Dumont, B., El-Farhane, R., Halimaoui, A., Laviron, C., Lenoble, D., Rossato, C., Casanova, N., Carron, V., Pokrant, S., Skotnicki, T.Year:
2005
Language:
english
DOI:
10.1109/ESSDER.2005.1546674
File:
PDF, 336 KB
english, 2005