Wavelet analysis based deconvolution to improve the...

Wavelet analysis based deconvolution to improve the resolution of scanning acoustic microscope images for the inspection of thin die layer in semiconductor

Kyungyoung Jhang, Hyoseong Jang, Byungil Park, Job Ha, Ikkeun Park, Kyungsuk Kim
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Volume:
35
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0963-8695(02)00028-2
File:
PDF, 1.09 MB
english, 2002
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