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Wavelet analysis based deconvolution to improve the resolution of scanning acoustic microscope images for the inspection of thin die layer in semiconductor
Kyungyoung Jhang, Hyoseong Jang, Byungil Park, Job Ha, Ikkeun Park, Kyungsuk KimVolume:
35
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0963-8695(02)00028-2
File:
PDF, 1.09 MB
english, 2002