Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator
Wooldridge, J, Blackburn, J, Muniz-Piniella, A, Stewart, M, Shean, T A V, Weaver, P M, Cain, M GVolume:
472
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/472/1/012002
Date:
November, 2013
File:
PDF, 760 KB
english, 2013