Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process
Shakoor, Rana I., Bazaz, Shafaat A., Saleem, M. MubasherVolume:
133
Year:
2011
Language:
english
Journal:
Journal of Mechanical Design
DOI:
10.1115/1.4004790
File:
PDF, 1.73 MB
english, 2011