Mechanically Amplified 3-DoF Nonresonant...

Mechanically Amplified 3-DoF Nonresonant Microelectromechanical Systems Gyroscope Fabricated in Low Cost MetalMUMPs Process

Shakoor, Rana I., Bazaz, Shafaat A., Saleem, M. Mubasher
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Volume:
133
Year:
2011
Language:
english
Journal:
Journal of Mechanical Design
DOI:
10.1115/1.4004790
File:
PDF, 1.73 MB
english, 2011
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