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[IEEE 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - Grenoble, France (2015.5.18-2015.5.21)] 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) - A 300mm Si photonics platform for optical interconnection
Mogami, Tohru, Horikawa, Tsuyoshi, Kinoshita, Keizo, Sasaki, Hironori, Morito, Ken, Kurata, KazuhikoYear:
2015
DOI:
10.1109/IITC-MAM.2015.7325665
File:
PDF, 592 KB
2015