The Use of Shape Memory Polymers for MEMS Assembly

Eisenhaure, Jeffrey D., Rhee, Sang Il, Al-Okaily, Ala'a M., Carlson, Andrew, Ferreira, Placid M., Kim, Seok

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Year:

2015

Language:

english

Journal:

Journal of Microelectromechanical Systems

DOI:

10.1109/JMEMS.2015.2482361

File:

PDF, 3.13 MB

english, 2015

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