Tip characterization method using multi-feature...

Ultramicroscopy 2016 / 03 Vol. 162

Tip characterization method using multi-feature characterizer for CD-AFM

Orji, Ndubuisi G., Itoh, Hiroshi, Wang, Chumei, Dixson, Ronald G., Walecki, Peter S., Schmidt, Sebastian W., Irmer, Bernd
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Volume:
162
Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2015.12.003
Date:
March, 2016
File:
PDF, 4.25 MB
english, 2016
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