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Nucleation of microcrystalline silicon: on the effect of the substrate surface nature and nano-imprint topography
Palmans, J, Faraz, T, Verheijen, M A, Kessels, W M M, Creatore, MVolume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/5/055205
Date:
February, 2016
File:
PDF, 1.13 MB
english, 2016