Higher order modes excitation of electrostatically actuated clamped–clamped microbeams: experimental and analytical investigation
Jaber, Nizar, Ramini, Abdallah, Carreno, Armando A A, Younis, Mohammad IVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/2/025008
Date:
February, 2016
File:
PDF, 2.62 MB
english, 2016