Development of nanoimprint processes for photovoltaic...

Journal of Micro/Nanolithography MEMS and MOEMS 2015 / 07 Vol. 14; Iss. 3

Development of nanoimprint processes for photovoltaic applications

Hauser, Hubert, Tucher, Nico, Tokai, Katharina, Schneider, Patrick, Wellens, Christine, Volk, Anne, Seitz, Sonja, Benick, Jan, Barke, Simon, Dimroth, Frank, Müller, Claas, Glinsner, Thomas, Bläsi, Ben
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Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.3.031210
Date:
July, 2015
File:
PDF, 1.50 MB
english, 2015
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