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Local deposition using an electrostatic inkjet technique with a nanopipette for photomask repair
Iwata, Futoshi, Ui, HiroyukiVolume:
11
Year:
2015
Language:
english
Journal:
International Journal of Nanomanufacturing
DOI:
10.1504/IJNM.2015.071898
File:
PDF, 990 KB
english, 2015