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Effects of Rapid Thermal Annealing on Structural, Chemical, and Electrical Characteristics of Atomic-Layer Deposited Lanthanum Doped Zirconium Dioxide Thin Film on 4H-SiC Substrate
Lim, Way Foong, Quah, Hock Jin, Lu, Qifeng, Mu, Yifei, Ismail, Wan Azli Wan, Rahim, Bazura Abdul, Esa, Siti Rahmah, Kee, Yeh Yee, Zhao, Ce Zhou, Hassan, Zainuriah, Cheong, Kuan YewLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.01.037
Date:
January, 2016
File:
PDF, 1.76 MB
english, 2016