Mechanisms of temperature dependence of threshold voltage in high-k/metal gate transistors with different TiN thicknesses
Nishida, Yukio, Yokoyama, ShinLanguage:
english
Journal:
International Journal of Electronics
DOI:
10.1080/00207217.2015.1036809
Date:
April, 2015
File:
PDF, 843 KB
english, 2015