Depth-selective 2D-ACAR studies on low-k dielectric thin...

Radiation Physics and Chemistry 2003 Vol. 68; Iss. 3-4

Depth-selective 2D-ACAR studies on low-k dielectric thin films

S.W.H. Eijt, A. van Veen, C.V. Falub, R.Escobar Galindo, H. Schut, P.E. Mijnarends, F.K. de Theije, A.R. Balkenende
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Volume:
68
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0969-806x(03)00184-1
File:
PDF, 321 KB
english, 2003
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