Analysis of radiative energy loss in a polysilicon CVD...

Applied Thermal Engineering 2016 / 01 Vol. 93

Analysis of radiative energy loss in a polysilicon CVD reactor using Monte Carlo ray tracing method

Liu, Ying-Wen, An, Li-Sha, Wu, Ren-jie
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Volume:
93
Language:
english
Journal:
Applied Thermal Engineering
DOI:
10.1016/j.applthermaleng.2015.09.046
Date:
January, 2016
File:
PDF, 1.37 MB
english, 2016
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