SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Measurement of polymerizing fluorocarbon plasma parameters: dynamic Langmuir probe technique application
Miakonkikh, A., Rudenko, K., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.677021
File:
PDF, 308 KB
english, 2012