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SPIE Proceedings [SPIE International Conference of Optical Instrument and Technology - Beijing, China (Sunday 16 November 2008)] 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications - High aspect ratio grating fabrication in SU-8 resist by UV-Curing nanoimprint
Wang, Xudi, Ge, Liangjin, Lu, Jingjing, Fu, Shaojun, Zhou, Zhaoying, Xia, Shanhong, Ho, Chih-Ming, Seidel, HelmutVolume:
7159
Year:
2009
Language:
english
DOI:
10.1117/12.807006
File:
PDF, 1.18 MB
english, 2009