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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X - Atomic layer deposition/molecular layer deposition for packaging and interconnect of N/MEMS
Lee, Y. C., Garcia-Blanco, Sonia, Ramesham, RajeshuniVolume:
7928
Year:
2011
Language:
english
DOI:
10.1117/12.877110
File:
PDF, 2.57 MB
english, 2011