Local residual stress monitoring of aluminum nitride MEMS...

Journal of Micromechanics and Microengineering 2016 / 02 Vol. 26; Iss. 2

Local residual stress monitoring of aluminum nitride MEMS using UV micro-Raman spectroscopy

Choi, Sukwon, Griffin, Benjamin A
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Volume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/2/025009
Date:
February, 2016
File:
PDF, 597 KB
english, 2016
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