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[IEEE 2015 Global Symposium On Millimeter Waves (GSMM) - Montreal, QC, Canada (2015.5.25-2015.5.27)] Global Symposium on Millimeter-Waves (GSMM) - High performance AlN-based surface acoustic wave sensors on TiN on (100) Silicon substrate
Soltani, A., Talbi, A., Gerbedoen, J-C, Bourzgui, N., Bassam, A., Mortet, V., Maher, H., BenMoussa, A.Year:
2015
Language:
english
DOI:
10.1109/GSMM.2015.7175461
File:
PDF, 407 KB
english, 2015