Microstructure and Optical Characterization of Magnetron...

Chinese Journal of Aeronautics 2007 Vol. 20; Iss. 2

Microstructure and Optical Characterization of Magnetron Sputtered NbN Thin Films

Xin-kang DU, Tian-min WANG, Cong WANG, Bu-liang CHEN, Long ZHOU
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Volume:
20
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/s1000-9361(07)60021-1
File:
PDF, 2.33 MB
english, 2007
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