High Resolution Differential Capacitance Detection Scheme for Micro Levitated Rotor Gyroscope
Huang Xiaogang, Chen Wenyuan, Liu Wu, Zhang Weiping, Wu XiaoshengVolume:
20
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/s1000-9361(07)60080-6
File:
PDF, 340 KB
english, 2007