Co-sputtering NbTiN thin films on PSG/Si substrates

Superconductor Science and Technology 2016 / 02 Vol. 29; Iss. 2

Co-sputtering NbTiN thin films on PSG/Si substrates

Wang, Chen, Zhang, Jingjiao, Zhang, Lu, You, Lixing, Su, Xiaodong
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Volume:
29
Language:
english
Journal:
Superconductor Science and Technology
DOI:
10.1088/0953-2048/29/2/025005
Date:
February, 2016
File:
PDF, 1.84 MB
english, 2016
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