SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Micromachining and Microfabrication Process Technology XVIII - Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification
Gu-Stoppel, S., Janes, J., Kaden, D., Quenzer, H. J., Hofmann, U., Benecke, W., Maher, Mary Ann, Resnick, Paul J.Volume:
8612
Year:
2013
Language:
english
DOI:
10.1117/12.2001620
File:
PDF, 545 KB
english, 2013