Controlling Germanium CMP Selectivity through Slurry...

ECS Journal of Solid State Science and Technology 2015 Vol. 4; Iss. 11

Controlling Germanium CMP Selectivity through Slurry Mediation by Surface Active Agents

Karagoz, Ayse, Basim, G. Bahar
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Volume:
4
Year:
2015
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0151511jss
File:
PDF, 1018 KB
english, 2015
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