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Electrical characteristics of MOS capacitor using amorphous Gd2O3-doped HfO2 insulator
Mei JI, Lei WANG, Yuhua XIONG, Jun DUVolume:
28
Year:
2010
Language:
english
Pages:
3
DOI:
10.1016/s1002-0721(09)60119-8
File:
PDF, 308 KB
english, 2010