Density functional theory calculations for estimation of...

Materials Science in Semiconductor Processing 2016 / 03 Vol. 44

Density functional theory calculations for estimation of gettering sites of C, H, intrinsic point defects and related complexes in Si wafers

Shirasawa, Sho, Sueoka, Koji, Yamaguchi, Tadashi, Maekawa, Kazuyoshi
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Volume:
44
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2016.01.001
Date:
March, 2016
File:
PDF, 1.24 MB
english, 2016
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