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[IEEE 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Kuala Terengganu, Malaysia (2015.8.19-2015.8.21)] 2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) - Deposition and characterization of ZnO thin film for FET with back gate biasing-based biosensors application
Fathil, M. F. M., Arshad, M. K. Md, Hashim, U., Ruslinda, A. R, Ayub, R. M., Gopinath, Subash C. B., Voon, C. H., Foo, K. L, Adzhri, R., Nuzaihan, M. N. M., Azman, A. H., Zaki, M.Year:
2015
Language:
english
DOI:
10.1109/RSM.2015.7355033
File:
PDF, 505 KB
english, 2015