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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Optical design and characterization of a gas filled MEMS Fabry-Perot filter
Sánchez-Rojas, José Luis, Brama, Riccardo, Ayerden, N. Pelin, Ghaderi, Mohammadamir, de Graaf, Ger, Wolffenbuttel, Reinoud F.Volume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2178773
File:
PDF, 3.25 MB
english, 2015