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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Research and development of capacitive transducer with linear acceleration
Sánchez-Rojas, José Luis, Brama, Riccardo, Korobova, Natalia, Kochurina, Elena, Timoshenkov, Sergey, Chaplygin, Yuriy, Anchutin, Stepan, Kosolapov, AndreyVolume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2181202
File:
PDF, 555 KB
english, 2015