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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Device Technology II - Parasitic resistance analysis for deep submicron CMOS with inverse modeling
Deura, Manabu, Yamaguchi, Seiichiro, Sugii, Toshihiro, Burnett, David, Wristers, Dirk, Tsuchiya, ToshiakiVolume:
3506
Year:
1998
Language:
english
DOI:
10.1117/12.323983
File:
PDF, 881 KB
english, 1998