SPIE Proceedings [SPIE SPIE Laser Damage - Boulder, Colorado, United States (Sunday 27 September 2015)] Laser-Induced Damage in Optical Materials: 2015 - Comparative STEREO-LID (Spatio-TEmporally REsolved Optical Laser-Induced Damage) studies of critical defect distributions in IBS, ALD, and electron-beam coated dielectric films

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