SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] BioMEMS and Smart Nanostructures - Investigation of MoO3-WO3 thin film microstructure for gas sensing applications
Galatsis, Kosmas, Ghantasala, Muralihar K., Li, Yongxiang, Kalantar-Zadeh, Kourosh, Trinchi, Adrian, Wlodarski, Wojtek, Taurino, A., Siciliano, Pietro, Cukrov, Lara, Kish, Laszlo B., Harvey, Erol C.,Volume:
4590
Year:
2001
Language:
english
DOI:
10.1117/12.454610
File:
PDF, 1005 KB
english, 2001