Modification of the positive photoresist surface by ion...

Russian Microelectronics 2015 / 11 Vol. 44; Iss. 6

Modification of the positive photoresist surface by ion implantation

Brinkevich, D. I., Brinkevich, S. D., Lukashevich, M. G., Prosolovich, V. S., Odzhaev, V. B., Yankovskii, Yu. N.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
44
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/s1063739715060025
Date:
November, 2015
File:
PDF, 503 KB
english, 2015
Conversion to is in progress
Conversion to is failed