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Modification of the positive photoresist surface by ion implantation
Brinkevich, D. I., Brinkevich, S. D., Lukashevich, M. G., Prosolovich, V. S., Odzhaev, V. B., Yankovskii, Yu. N.Volume:
44
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/s1063739715060025
Date:
November, 2015
File:
PDF, 503 KB
english, 2015