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Different methods to alter surface morphology of high aspect ratio structures
Leber, M., Shandhi, M.M.H., Hogan, A., Solzbacher, F., Bhandari, R., Negi, S.Volume:
365
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.01.008
Date:
March, 2016
File:
PDF, 5.56 MB
english, 2016