Self Focusing SIMS: Probing thin film composition in very...

Applied Surface Science 2016 / 03 Vol. 365

Self Focusing SIMS: Probing thin film composition in very confined volumes

Franquet, Alexis, Douhard, Bastien, Melkonyan, Davit, Favia, Paola, Conard, Thierry, Vandervorst, Wilfried
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Volume:
365
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2016.01.056
Date:
March, 2016
File:
PDF, 2.98 MB
english, 2016
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