A Model for Temperature Rise of Polishing Process...

Journal of Tribology 2004 Vol. 126; Iss. 3

A Model for Temperature Rise of Polishing Process Considering Effects of Polishing Pad and Abrasive

Horng, Jeng-Haur, Jeng, Yeau-Ren, Chen, Chun-Liang
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Volume:
126
Year:
2004
Language:
english
Journal:
Journal of Tribology
DOI:
10.1115/1.1705665
File:
PDF, 291 KB
english, 2004
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