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Determination of Young's modulus and yield strength of porous low-k dielectric films by nanoindentation under complete consideration of the substrate influence
Herrmann, M., Richter, F.Volume:
3
Year:
2009
Language:
english
Journal:
International Journal of Surface Science and Engineering
DOI:
10.1504/IJSURFSE.2009.024362
File:
PDF, 817 KB
english, 2009