Multi-scale analysis of high precision surfaces by Stylus...

International Journal of Surface Science and Engineering 2009 Vol. 3; Iss. 4

Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy

Jouini, N., Gautier, A., Revel, P., Mazeran, P E., Bigerelle, M.
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Volume:
3
Year:
2009
Language:
english
Journal:
International Journal of Surface Science and Engineering
DOI:
10.1504/IJSURFSE.2009.027418
File:
PDF, 855 KB
english, 2009
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