Investigation of AlN thin film growth on MgO(111)...

Journal of Crystal Growth 2016 / 02 Vol. 436

Investigation of AlN thin film growth on MgO(111) substrates using low temperature helicon sputtering system

Hsu, Wei-Fan, Kao, Hui-Ling, Lin, Zih-Ping
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Volume:
436
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2015.11.043
Date:
February, 2016
File:
PDF, 5.16 MB
english, 2016
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