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Monolithic transparent 3D dielectrophoretic micro-actuator fabricated by femtosecond laser
Yang, Tao, Bellouard, YvesVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/10/105009
Date:
October, 2015
File:
PDF, 1.74 MB
english, 2015