Investigation of SU8 as a structural material for...

Journal of Micro/Nanolithography MEMS and MOEMS 2015 / 12 Vol. 14; Iss. 4

Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components

Tian, Yingtao, Shang, Xiaobang, Wang, Yi, Lancaster, Michael J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
14
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.14.4.044507
Date:
December, 2015
File:
PDF, 5.10 MB
english, 2015
Conversion to is in progress
Conversion to is failed