Evaluation of the effect of data quality on the profile uncertainty of critical dimension small angle x-ray scattering
Sunday, Daniel F., List, Scott, Chawla, Jasmeet S., Joseph Kline, R.Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.1.014001
Date:
January, 2016
File:
PDF, 4.08 MB
english, 2016