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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Structures and light emission properties of ion beam synthesized FeSi2 in silicon

Chow, C. F., Gao, Y., Wong, S. P., Ke, N., Li, Q., Cheung, W. Y., Shao, G., Lourenco, M. A., Homewood, K. P., Chiao, Jung-Chih, Jamieson, David N., Faraone, Lorenzo, Dzurak, Andrew S.
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Volume:
5650
Year:
2005
Language:
english
DOI:
10.1117/12.582335
File:
PDF, 255 KB
english, 2005
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