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SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 22 January 2005)] Photon Processing in Microelectronics and Photonics IV - The new technology of the materials process: microvia formation by CO2 laser drilling machine
Chen, Ming-Fei, Chen, Yu-Pin, Fieret, Jim, Herman, Peter R., Okada, Tatsuo, Arnold, Craig B., Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Lu, Yongfeng, Geohegan, David B., Trager, Frank,Volume:
5713
Year:
2005
Language:
english
DOI:
10.1117/12.593087
File:
PDF, 848 KB
english, 2005