Nanometer-Scale Fabrication of Hydrogen Silsesquioxane...

Journal of Nanoscience and Nanotechnology 2013 / 03 Vol. 13; Iss. 3

Nanometer-Scale Fabrication of Hydrogen Silsesquioxane (HSQ) Films with Post Exposure Baking

Kim, Dong-Hyun, Kang, Se-Koo, Yeom, Geun-Young, Jang, Jae-Hyung
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Volume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.6986
Date:
March, 2013
File:
PDF, 344 KB
english, 2013
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