Nanomechanical study of amorphous and polycrystalline ALD HfO2 thin films
Tapily, K., Jakes, J.E., Gu, D., Baumgart, H., Elmustafa, A.A.Volume:
5
Year:
2011
Language:
english
Journal:
International Journal of Surface Science and Engineering
DOI:
10.1504/IJSURFSE.2011.041402
File:
PDF, 912 KB
english, 2011