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Epitaxial nickel disilicide with low resistivity and excellent reliability
Hsin, Cheng-Lun, Deng, Shiu-ShengVolume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/6/065704
Date:
February, 2016
File:
PDF, 1.08 MB
english, 2016