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Optimized tilted c-axis AlN films for improved operation of shear mode resonators
DeMiguel-Ramos, M., Mirea, T., Clement, M., Olivares, J., Sangrador, J., Iborra, E.Volume:
590
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.08.010
Date:
September, 2015
File:
PDF, 796 KB
english, 2015